The Software Design Of Industrial SPM And Method Of 3D Surface Image Matching

So far, Scanning Probe Microscope(SPM) has been playing an important role in not only the fundamental disciplines such as physics, chemistry, biology and medicine but also the applied disciplines such as materials, microelectronics, due to its high resolution, real-time imaging, nano-manipulation ability and other characteristics. According to the different near-field functional parameters between probe and samples and the application domains, SPM has produced many branches, which form a strong family. But with the popularity of industrialization, SPM has exposed many deficiencies such as slow scanning speed, the limitation of the scanning area and so on. Aiming at the imperfections of traditional SPM, the project develops a new industrial scanning probe microscopy system and studies on the key technologies of probe morphology calibration and probe replacement, 3D morphology acquisition, fast scanning control and compensation and the quick and nondestructive insertion of the needle.The thesis is concentrated on the computer software development and testing of the SPM system. The computer software contains two parts including real-time scanning and offline image processing. In addition, an image matching arithmetic is proposed to acquire real three dimensional morphology and has achieved good mosaic effect by testing on an authentic sample. The thesis mainly includes the following parts:1. An overview of the background of SPM and 3D image matching technology, including the development history of SPM and application of image matching technology in obtaining real 3D image morphology.2. According to the work flow chart of the system, a reasonable application framework is built and the class library and auxiliary class library is assigned to different function modules. Besides, the data transceiver principle of TCP/IP as a main communication protocol and the display principle of OpenGL as a main graphical interface are elaborated in this section.3. Various modules of motor control, region selection, mark match, fast scan, 3D scan, fast engagement and view interface are designed to realize the function of real-time scanning(Realtime) in the Computer Software system, which play different roles and work together to complete the real-time scanning of the sample.4. The image offline processing module(Offline) is designed in order to process the scanning data from Realtime, including the display of image(plan graph, 3D image, partial image), the statistics of image(height probability graph, section line, roughness), the post-processing of image(line fitting, flatten).5. An image matching technique is designed to restore real 3D image by dealing with 2D scanning data. Firstly, the best match point is found by an image matching arithmetic through pro-processing, Then, a 3D topography image is achieved after a series of operations on the sidewall image such as flipping by columns, cutting, rotating and stitching. Finally, this arithmetic is applied to a rhombic prism’s surface and the result is evaluated.