Multi-body Dynamic Simulation And Dynamic Properties Optimization Of Ultra-precision Stage With Air-bearings

Lithography is the key equipment in Integrated Circuit(IC) manufacture, meanwhile the precision stage with gas-lubricated bearings is the key part of lithography, whose working performance directly determines the performance of the lithography. So it is with great significance to study the precision stage. The performance of the gas-lubricated bearing, the modeling and simulation of the multi-body dynamic model as well as the optimization of the model's dynamic performance were studied in this thesis.Based on the compressible lubrication theory, the parameters and the 3D model of the bearing were established. The FEM software ANSYS ICEM CFD and FLUENT was used to simulate the model's pressure distribution. Integrated the pressure and the bearing capacity was computed. Repeated the process, the bearing capacity of the model which works in different conditions was created. In terms of the structure and working principle of the ultra-precision stage, the multi-body dynamic model of the stage was created. Based on the multi-body dynamic model, the modal and the dynamic response of the stage was studied.According to the optimization theory, the dynamic model was parameterized, the design variable and target variable were created, and the evaluation program was compiled. Optimization model was also established based on Isight and parameter optimization design of precision stage was carried on the platform. The optimization results implied that the performance of the stage was improved apparently.