Failure Analysis Of MEMS High G Accelerometer

Accelerometers are widely used in the monitoring system of all kinds of motion processes, obtaining acceleration characteristic and motion information of detected objects,which can provide reference data for the kinematic analysis. MEMS high g accelerometer with its high range, is mainly used in harsh environments such as shock, explosion and penetration. Therefore, in order to ensure the reliability of it, strict requirements must be applied to its overload capabilityIn order to explain the failure occurs in MEMS high g accelerometer during working process, various means have been applied on it. First the basic theory of the failure of MEMS accelerometer is elaborated, including the common structure of MEMS devices as well as the common research methods of failure problems. Then the MEMS high g accelerometer being researched on is introduced, including the structure and the working mechanism of it. Quasi-static theory, vibration theory and stress wave theory have been applied on the analysis of the response of accelerometers under high overload. The residual deformation in the structure of MEMS high g accelerometer after high overload has been studied using the method of simulation, also the effects which the crafts of MEMS machining may have on the failure of the accelerometer structure. The anti-overload performance and failure conditions of MEMS accelerometer have been studied by the means of SHPB test and Maxiete hammer test. Through the comparison with standard accelerometer the output performance of MEMS high g accelerometer is studied.