Terahertz Frequency Multiplier Based On MEMS Technology

In recent years, the rapid development of THz technology led to the prosperity of THz industry, which THz frequency multiplier is a major way to get the THz frequency source, and therefore the research and development of THz frequency multiplier have important significances.The paper introduces the characteristics of THz and the development at home and abord of the multiplier, the basic theory of the multiplier, analysis methods of the multiplier. Also introduces a new process-MEMS technology, its precision is higher than the traditional process. So the technology has a unique advantage in the high-frequency device.Based on the theory of multiplier, this paper uses simulation software ADS and HFSS to simulation and designe K-band frequency doubler, W-band frequency doubler and a frequency doubler of 290 GHz.The K-band frequency doubler uses transistor ATF36163 for designing. The multiplier structure mainly composites by the matching circuit, bias circuit and the filter circuit. After the ADS simulation, we obtaine the second harmonic output power is 3.15 d Bm. Using the traditional process be processed the test, in fact, the measured value of the multiplier is 1.06 d Bm. After the measured values compared with simulated values, we analyze the causes, conduct a summary and proposed improvements.The W-band frequency doubler uses Schottky diode to design, the structure of the multiplier mainly uses the waveguide cavity and quartz substrate shielded microstrip lines. It mainly composites by microstrip waveguide probe, bias circuitry, the filters and matching circuit. Use ADS and HFSS for joint simulation, we obtain the second harmonic output power is 1.402 d Bm.Based on the design of the W-band frequency multiplier, we design a 290 GHz multiplier. Its structure is the same with the W-band frequency multiplier, also composites by microstrip waveguide probe, the bias circuit, the filters, matching circuit. Use ADS and HFSS for joint simulation, we obtain the second harmonic output power is 7.889 d Bm.Based on the design and simulation of the different bands of frequency multiplier we achieve the purposes of THz frequency multiplier circuit design research. It has a certain role for the development of terahertz technology.