Design Of Bandpass Filter Based On MEMS

The MEMS technology integrate the mechanical element, micro sensor, micro actuators and signal processing and controlling circuit on general Si subtract through micro manufacturing. Through the silicon microelectronics technology and mechanical technology together, this technique can make innovations for all kinds of product, make completely chip system realization become possible.MEMS filter is made on high resistance film that impending with carrier, and filter related media dielectric constant is only 1.04, its loss is tiny, only a transmission line with inner resistance loss, suppression can be obtained, and the 60dB insertion loss is only 1dB, the Q value can be achieved more than 800.The purpose of this paper is majored in introducing the band pass filter based on MEMS system Technology manufacturing,describing the structure and principle, analysing the main characteristic parameters and design method. In the paper, a Parallel coupling line band pass filter with the center frequency for 30GHz, bandwidth for 1GHz will be designed, Using ADS to fund the original circuit simulation and optimization, and finally using Ansoft HFSS software established filter 3d model of the Si substrate, the model based on the traditional microelectronics technology, combined with MEMS technology through which the filters quality factor can be greatly improved.