Design And Fabrication Of A MEMS-based Electric Field Sensor Based On BCB Bonding

Electric field is related with our life. Recently more and more attention hasbeen attracted to electric field detection with the development of science andtechnology. Within all kinds of electric field sensors, electric field sensors basedon MEMS technology attracts many researchers due to its small size, low weight,high sensitivity, low power consumption and easy-to-mass characteristics, and inrecent years we had made much more progress.This paper is mainly about the electric field sensor based on BCB bondingand MEMS technology. We chose an optimum scheme based on thermalactuators for further exploration after deeply investigated the existing electricfield sensors based on MEMS technology. We discussed the optimization ofstructural based on simulation. Double-layer sensing electrods are used tosignificantly develop the performance of the sensor by a factor of two. BCB isused as the supporting layer between shutter and sensing electrods. Thefabrication of the sensor is very easy. Besides, we investigated the characteristicsof partially-cured BCB etching, and the results can be used as process guideline.