| The offsets of the output beam leaded by the heat aberration of the RF slab CO2laserwill directly affect stability of the laser power and the laser mode and then affect thequality of laser material processing. Conventional mirror heat distortion compensationmethod adopt thermally compensated, the compensation method can achieve the purposeof regulating the external light path, but the longer response time of the process can notmeet the requirements of high-speed machining. Against the problem of power attenuationand the poor mode caused by mirror heat distortion of RF slab CO2laser, this papercombines the characteristics of the optical shaping system designs an output beammicro-adjustment system based on the adjustment of turning mirror, the main contents ofthis paper include:(1) The optical system of the RF slab CO2laser is studied in this thesis. The principleof the beam shaping system was analysed. The beam shaping system achieves the purposeof transformation by focusing and collimator; spherical mirror of the optical shapingsystem achieves the collimator of the waveguide direction and the focusing of the unstabledirection; through a spatial filter to filter out the sidelobe of the beam in the unstabledirection; the divergence angle and the spot size of the beam in the unstable directionmatches that of the waveguide direction by a cylindrical lens, finally the beam becoming acircuit beam which matches the industry processing.(2) A scheme,turning mirror rotation adjustment, is used to achieve micro-adjustmentof the RF slab CO2laser output-beam. The paper design a precision turning mirroradjustment, using high-precision piezoelectric ceramic locator as micro-displacementdrive, completing the piezoelectric actuator circuit design, fitting the mach function of thecontrol single of the system, designing the hardware circuit of the control single,mechanical structure which can achieve the rotation of the turning mirror.(3) The PLC HIM and control driver is designed on the supporting software. HIMincludes a control single given windows and a output single time detection window, whichcan achieve the control and detection of the system control singles. System control singlesgenerated by the PLC, the control signals are translated according to the numer ical size of the laser power duty ratio and then the system control singles will be amplifier by thedriver circuit for the purpose of control the piezoelectric ceramic output displacement. Theturning mirror then occurs a quantitative rotational to finally achieve the micro-adjustmentof the out optical beam.In this paper，the output optical beam micro-adjustment system is an important partof the high-power RF slab CO2laser, which can run stable on the laser prototype andeffectively improve the quality of beam patterns as well as well as the stability of the laserpower while the machine running under high output laser power situation. |
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