The Research Of Automated Batch Test And Calibrating System For MEMS Inertial Sensors

MEMS inertial sensors have been widely used in many fields,such as automotive electronics,mobile phones,intelligent machinery,electronic toys,health care equipment,navigation,attitude measurement,intelligent ammunition and other civilian and military fields.But the test and calibration of MEMS inertial sensors are still operated mainly in manual and single-piece mode.The efficiency of this kind of test and calibration is very low,it takes much time and is easy to operate wrongly.In order to improve the traditional test and calibration method,an automatic batch test and calibration system for MEMS inertial sensors is designed.According to the function and performance index of the system,the overall structure of the system is designed.The system mainly includes the lower computer,the upper computer and the three-axis turntable.The lower computer consists of a multi-channel data acquisition card,a switch and a data storage and processing module.The hardware design and software design of the lower computer are described in detail,and the software design of the upper computer is also introduced.In the part of the hardware design of the lower computer,three kinds of data acquisition circuits for MEMS inertial sensors whose output are analog and output interface are SPI and serial port,Ethernet data transmission circuit,SD card backup storage circuit and power circuit of multi-channel data acquisition card,as well as data storage and processing module are discussed orderly.In the part of the software design of lower computer,the design of three kinds of multi-channel data acquisition program,the Ethernet communication program,the SD card storage program and the design of the program of the data storage and processing module are introduced.In the part of the software design of upper computer,the software development environment,the software flow and the realization of main functional modules are introduced.The system can test and calibrate 64 MEMS accelerometers,32 MEMS gyroscopes and more than 8 MIMUs simultaneously.It can select experimental projects and control the power and the three-axis turntable automatically.It also has the function of optional sampling rating.Finally,the test results of the main functional modules of the system,the procedure of test and calibration for MEMS inertial sensors,and the results of static and multi-position tests for MEMS accelerometers,static and velocity experiments for MEMS gyro and calibration experiments for MIMU are given.The results show that the system can test and calibrate multiple MEMS inertial sensors automatically.It can be more efficient than traditional single,manual test and calibration and reduce the manpower.