Design And Development Of The Ion Current Detection System On The Basis Of The Hall Effect Current Sensor

In the field of coating, the secondary ion source can greatly improve the film-formability, to explore the mechanism of interaction between the ion source and the substrate surface, the study of the nature of the ion beam become the research hotspot. Among them, as the emphasis of many research direction of the ion beam, the ion current attached much attention. Thus comes many ionic current detection methods, such as probe, Hall current sensor, Rogowski coil, etc. However, due to the interaction between individual particles, which is the formation of the plasma, the discharge type is more complex. So we require the use of the diagnostic method for diagnosis of plasma ion beam to determine the nature of the discharge reaction types.The nature of the contents of this paper is determined after the study of the ion source and the test methods of the ion current, and the analysis of the plasma.Hall effect current testing system is designed based on the principles of the Hall effect. Using the system, the Ar, O2, N2anode layer ion source beam current density is detected under these parameters with one of the parameters changes:air pressure0.1Pa, the operating power of the ion source250W, the gas flow10sccm, test results for the current emission spectroscopy showing that, although the collection of the current is much smaller than the ion source anode current due to the limitation of the position of the current collector, however, for different ion source, the trends of the ion current are in good agreement with the anode current of the ion source.The result shows that under the conditions of the gas flow2-20sccm, air pressure0.1-0.6Pa, the operating power of the ion source10-400W, using the Hall effect current sensor for detecting the ion current, the result is in good agreement.