| As a traditional driving method of resonators, Electrostatic actuationis widely used in all kinds of resonators for its good stability and highsensitivity. In recent years, Optical gradient force as a new way to driveresonators has attracted a lot of attention. The new actuation way has theadvantages of excellent dynamic character and combination of opticalactuation and optical detection. In this paper, the inherent nonlinearcharacteristics of the optical gradient force, electrostatic force and squeezefilm damping between perforated plates are analyzed. The nonlineardynamic models of the ring and spokes resonant system and nanoscale slotwaveguides of hyperbolic metamaterial driven by optical gradient forceand rectangular perforated plates driven by electrostatic force are proposed.Multiple scales method and finite element method are used and theresearch results show:1. The optical gradient force makes resonant system show a strongsoftening nonlinearity. The amplitude increases and the resonancefrequency shifts as the input optical power increases. Moreover, theamplitude and resonance frequency of the nano-resonator decreases as theinitial gap of the rings increases. Therefore, the resonance frequency canbe adjusted by changing the optical input power.2. The optical gradient force bewteen nanoscale slot waveguides ofhyperbolic metamaterials is larger than regular materials by more than twoorders and decreased when the filling ratio of silver is increased.3. Perforation will reduce the electrostatic and damping forcesbetween two parallel MEMS plates. The response of the perforated plates actuated by electrostatic force is analyzed. Result shows that when the sizeof holes is enlarged, the electrostatic and damping forces decrease; thesteady state amplitude decreases; the system is more softened and thequality factor increases.In all, this work can be useful for the further design and performanceprediction of nano-resonators driven by the optical gradient force andelectrostatic force. |
PDF Full Text Request