Research Pressure Sensor Chip Laser Micromachining

The Laser cutting technology is generally employed for its outstanding features.And high-precision laser cutting also plays an important role in most fields and has abroad development prospects. Laser micromachining has no mechanical stress, highprecision, easy to use, processing flexibility, low cost, less pollution, etc., in manyfields of aerospace, electronics, precision machinery and other fields has been widelyused. And to enhance the machining precision from micron to nano-scale. In thispaper, the basic principle of laser processing, the laser classify different lasersdiscussed in laser micromachining applications.In this paper, the finite element numerical simulation ansys instantaneoustemperature field of study instead of using a simplified geometric model, followed byunit allocation, meshing, applied load, and then using ANSYS software for lasercutting pressure sensor chip multi-field solver is coupled analysis methods.Depending on the respective wavelengths of the laser light source, a differentdistribution of the pressure sensor chip temperature field in the laser cutting werestudied. Laser cutting process was simulated using ANSYS software, so we can easilylearn more about the temperature in different parts of the laser cutting and lasercutting workpieces distribution reasonable choice of laser light. The influence of thewavelength of the material, and the simulation model as a guide, the actualexperiment.The topic of this paper, the experiment finally adopted Han’s Laser355nmwavelength UV laser marking machine for the processing equipment for cuttingexperiments on complex chips. Analysis of the laser focus, influence of laser power,cutting speed and cutting the assist gas during laser cutting of different quality. Andthe pressure sensor chip to obtain a high cutting process.