The Fabrication And The Temperature Characteristics Research On Phc-VCSEL

The vertical-cavity surface-emitting laser (VCSEL) is an attractive light sourcefor an expanding range of applications. Due to low cost manufacturing, low powerconsumption, simplified packaging, attractive beam properties (circular and lowdivergence beam) and excellent high-speed modulation characteristics at low currents,it has been extensity used in short-reach optical communication, optical interconnects,and optical storage. However, the VCSELs’ disadvantages of multi transverse modeemission and the polarization unstable limit its using in the new emerging applicationareas such as sensing and atomic clocks. Therefore, improving the modecharacteristics and increasing the stability of its polarization state are becomingcritical issues in the field of VCSELs’research.For getting a single mode operation, the oxide aperture is restricted to3μm in theconventional oxided VCSELs. The output power is limited to a low level, in themeanwhile, the series resistance will be larger. However, by introducing themicro-nano optical structures such as photonic crystals into the distribution ofVCSELs Prague mirror (Distributed Bragg Reflector, DBR) high output powerVCSELs operating at stable single mode was obtained. In the PhC-VCSEL, injectedcurrent and output light was restricted by oxide aperture and photonic crystalrespectively. For the large oxide aperture PhC-VCSEL could operate at high outputpower meanwhile the photonic crystal pattern could raise the couple efficiencybetween VCSEL and optical fiber. In this paper, through the research on theprocessings of the fabricating of PhC-VCSELs, and the change of the Heat sinktemperature control device to control the indirect ambient temperature, for ambienttemperature affecting the test performance of PC-VCSELs, we analyze the results,and find the suitable operating temperature range. The main contents as follows:1. Researching and optimizing the process of VCSEL. Through improving theprocess of flatting process and P-contact procseeor, we raise the yield of VCSEL.2. Investigateing the dry etching process for fabricaing photonic crystal VCSELs,and optimizating the process of getting steep sidewalls and flat bottom of the photoniccrystal structure.3. Testing photonic crystal VCSELs on output power threshold, slope efficiencywith the change of temperature characteristics, and interpreteing the results.