The Model Experiment And Analysis Of The Micro Cantilever Stacked Chip

This paper is about the study of the vibration characteristic of the micro stacked chip. The stacked chip was excited by the PZT, which was driven by the Agilent33120A Signal Generator. The vibration signals of the stacked chip were collected by the two-probe Laser Doppler Vibrometer(LDV) System. The dynamic model of the stacked chip was built, and the model equivalent parameters of the stacked chip were solved.(1) The dynamic model of the micro stacked chip was built based on the classical cantilever beam model, the amplitude frequency characteristic and the phase frequency characteristics of the model were analyzed. The vibration of base excited cantilever was complex model, the phase difference between the cantilever and the base was complex, it had to be compensated, and the center of the Nyquist Circle may be in any quadrant, which was verified by experiment.(2) The vibration of the stacked chip was proved to be linear by comparing the responses of three sweep excitation methods. Compared the responses of the base and the cantilever, analyzed the interaction relationship of the cantilever and the base, and obtained the frequency response curve.(3) Obtained the phase difference curve of the cantilever using the Hilbert Transform, verified the phase difference compensated methods, solving the scaling factor between compensation phase difference and frequency, and drew the Nyquist Circle of the cantilever.(4) Fit the Frequency Response Functions to get the natural frequency and damping ratio of the cantilever. Scanned chip surface and study, learned that the cantilever of the chip is a two-dimensional vibrating cantilever, using the classical cantilever beam model to approximate the model equivalent parameters of the stacked chip.