Research On Macro-stage Of Long-stroke Precision Positioning System

In nowadays, the science and technology development change rapidly, and most ofhigh-tech products towards smaller, higher performance. Under this trend, more and moreattention to technical precision positioning, and it also has important application in medicine,biology, electronics and other fields, so the development and perfection of large strokeprecision positioning stage has a very good application prospect. Due to technical limitations,the large stroke precision worktable mainly in the macro/micro dual-drive stage. While themacro stage is fundamental to the whole system. In order to make the stage work better, andrealize large stroke nanometer positioning, tit is should guarantee macro stage positioningaccuracy, speed and stability. The purpose of this paper is to demonstrate and simulationseveral key techniques of the macro stage, in order to get better control algorithm and theproduction of materials, so that it can lay a solid foundation for precise positioning of themicro stage. Therefore, the main work of this paper is divided into three parts:Firstly, study the consisting of macro stage in the large travel and high precisionpositioning system, and propose a new stepper motor drive algorithm. This closed-loop controlmethod based on PI parameters self-tuning fuzzy control not only adjust the speed quickly, butalso have very high robustness and adaptability. It is combines the advantages of theconventional PI controller and the fuzzy controller can meet the precision and speedrequirement of the macro stage.Then, use ANSYS software to analysis thermal stability and vibration for differentmaterials. The comprehensive analysis results show that zero expansion glass is the mostsuitable material for making macro stage, in the future zero expansion glass will also becomepopular in the field of precision materials.Thirdly, make a depth research of Nurbs curve interpolation algorithm, and right chorderror of Nurbs interpolation algorithm was compensated. Simulation result of Matlab provesthe feasibility of the Nurbs curve interpolation algorithm to fit asymmetric hysteresischaracteristics of piezoelectric ceramic, which is a foundation for further improving theaccuracy of the whole system.