Integration And Design Of 1550nmVCSEL And SOI On - Chip Grating Coupler

With the development of modern integrated optics, the research of integrated optics and optical interconnection become more and more important. Vertical cavity surface emitting lasers (VCSEL) is one of the important sources for the integrated optical system and optical interconnection applications, and 1550nm is an important research direction of long wavelength. As a coupling device in integrated optics, grating coupler becomes the most potential coupling method in integrated optics because of its advantages in coupling efficiency, alignment tolerance and chip surface polishing.This thesis does some research of the integration of 1550nm VCSEL and grating coupler on SOI. We designed a 1550 nm VCSEL, which comprises a cladding, multiple quantum well (QW) active area, oxide restrict layer, substrate, and high reflectivity distributed bragg reflectors (DBRs). The cavity of VCSEL consists of the cladding, multiple quantum well active area, and limiting layer. AlGaAsSb/AlAsSb has been used for the DBR mirror system to achieve lattice matching. The QW/barrier comprises GalnAsN/AlGalnAs. By epitaxial growth, the DBR is banded with the active layer at the cavity antinode of the standing wave field, and the cavity length is seted to 1.0λ. A double-oxide layer, which is more 0.03mW beneficial than a single-oxide layer, has been adopted in the laser. Based on the beam propagation method and finite difference time domain algorithm,4×1 array of grating couplers for hybrid integrated light source is proposed with bend waveguides and 2×1 couplers. Then, this thesis designs a uniform grating couple and a structure of binary blazed grating coupler based on silicon on insulator (SOI) structure by introducing a TE mode from the cavity to the in-plane grating. Simulation result shows that their coupling efficiency reaches to 36.2% and 46.6% at around 1550nm wavelength, respectively. During the alignment and encapsulation of the device, the process parameters were optimized by using the BCB as the bonding medium. At last, this thesis describes the test method of the VCSEL and grating coupler. The material selection and preparation methods of the VCSEL and grating coupler are explained. Then, the bonded wafer of the VCSEL and SOI was fixed on PCB board and connected with the goldwires. At last, this thesis describes the test method of the VCSEL and grating coupler by building the optical waveguide automatic alignment experiment platform.Research on this subject will solve the problem of arrayed waveguide grating demodulation integrated microsystem between input gratings and VCSEL. The research will benefits the miniaturization and integration of the fiber grating demodulation system, and plays an important role in promoting the development of the fiber grating demodulation. It will break the restriction of the rapid development of the optical interconnection technology in the integrated circuit at the same time.