Research On Energy-saving Of HVAC System In Semiconductor Plant

With the development of the semiconductor industries in recent years, clean roomincreases rapidly, the high-energy consumption in the building is getting more and moreattention of worldwide. Especially for the operation of the plant24hours, the powerconsumption is very large, reducing its energy consumption is particularly important. Thispaper starting from the energy savings, through numerical simulation calculation andcomparison of the actual data, the economic analysis results to semiconductor plant indoor airquality control and HVAC system saving energy measures, provide a theoretical basis andreference for the design of energy-efficient building class.Based on the theory and existing airflow in two ways semiconductor clean rooms, thispaper use of CFD numerical simulation of airflow to shop for energy research. CFDsimulation in this article using the finite volume method, use the Fluent software for bothforms of airflow temperature and velocity field simulation under different air speeds.Simulation results show that the turbulence level in ISO6clean room sent back airflowmeasurement of cleaning better airflow uniformity and stability, cleanliness and uniformdistribution of temperature and velocity. At the request of the same cleanliness, the sendingside back by reducing the number of clean room ventilation, thereby reducing the amount ofclean room air for clean room consumption is the meaning of significant.By actual data semiconductor clean room air conditioning circulation water system fornearly a year and the AHU energy consumption, analyze and study its composition and energysaving potential, proposed a practical energy saving measures. The result found that the totalenergy consumption for more than30%of the chiller running, and full capacity throughoutthe year less than20%. Increase the drive for more efficient energy-saving meanwhile, in thecirculating water system using variable-speed pump, the pump runs more economical, longer life, and PM engineers also simpler than before. Soft-start the drive to reduce the impact onthe grid, and can run more than30%energy saving.