Air Flow Simulation Of Mini-environment In The Industrial Clean Room

With the development of people life,clean room technology is being more and more used in those field that must to be very high demands for manufacture settings such as health,microorganism,microelectronics,etc. As the semiconductor process technologies advance,the conventional clean rooms no longer meet the critical demand on air quality. The beginning investment of clean room especially high cleanliness class room is very big,operating administrative expense is very high,thereby giving rise to the design concepts of mini-environment——SMIF(standard mechanical interface). This paper presents the introducing the result of national and abroad research to show that the SMIF technology will become as a main stream in the high class air clean area.The cleanliness degree of clean room obtaining has close relation with air flow organization. In order to meet the requirement of cleanliness Class 1 inside the space of SMIF,the circulation zones should be eliminated or reduced as much as possible. So the velocity gradient and pressure gradient in the flow field must be minimized as much as possible. Many years ago,the design of air flow of clean room is based upon experience. Today,we can find the problem of air flow which is unreasonable by the CFD simulation. So,we can improve the project in time and more reasonable in project.This paper adopts generally used CFD software,uses k -εturbulent flow model,implements SIMPLE methods,then sets up model in CFD,amends boundary conditions,processes data to testify the calculation of software,studies on properties of air flow in SMIF.This paper achieves the simulation of the static air flow in the SMIF environment and simulates the cases of different opening. By contrast with different cases, we can find the different pressure of in and out mini-environment is closely to the opening size. The lager size of opening is,the smaller different pressure is. Thus,the different pressure cannot meet the needs. If the opening too small,the different pressure will be improve. But this will cause the grads of pressure and velocity to go up only to affect the uniformities if air flow. In addition,the inlet velocity is one of the important facts that have great effects on the air flow in mini-environment.