Numerical Simulation And Analysis On Air Flow In A Vertical Directional Flowing Clean Room

Air cleaning technology is widely used in micro-electronic industry, accurate mechanic, medical treatment, ergonomics engineering, medical industry, plastic making and food industry. With the development of world economic and science technology ,the research of air cleaning technology is more and more enhanced, and used more and more widely, the product and equipment of air cleaning more and more pefect,the design thought is more and more advanced. The suitable design of air flow distribution is with more important meaning in air cleaning technology.There are two methods which are theoretic analysis with test and computer simulation calculation. The test method is intuitionist and easy to do, but it is too expensive and cost more time to design, cost many more people, often with error and with no currency. With the fast development of modern computer technology, the performance of computer is higher and it costs less and less, and provide matter base and main method for development of CFD(Computational Fluid Dynamics ) and research of many phenomenon and rule of flow .The CFD technology has been a necessary method of technology research and solving problem in heating and ventilation. Comparing with test method, the CFD technology can dope out the air distribution exact, cost lowly and finish it in short time. We can forecast the good and the bad characteristic of the air flow of air cleaning room in different ways, and we can change some characters to optimize the air distribution to satisfy the requirement of design when we do air cleaning room designing.The article analyses the influence factor of vertical directional flowing clean room, and gets the result with help to design and application of air cleaning room. The air flow characters will influence the cleaning degree and controlling of pollution, and influence the cleaning result in vertical directional flowing clean room. The air flow parallelism, undistributed degree of velocity, minimum air velocity in vertical directional flowing clean room servicing for production of VLSI must be satisfied.This task does the numerical simulation of the air flow in two ways of return air (one side low return air and two side low return air) as model which is in working area of an air cleaning room with 5th design class, and analyses and compares the air distribution and air flow of cleaning room, observes the air flow parallelism in different way of return air. In order to get the air distribution rule and complete the numerical simulation by using appropriate numerical calculation method and get the relationship of air flow characters with the way of return air, we do testing to an engineering, measure air flow velocity of representative section, and compare the testing results with the numerical calculation results to verify the accuracy and reliability. On this base, we go to simulate and calculate air distribution of the air cleaning room when the workbench is set, and verify the air flow character could satisfy the requirement of directional flow, solve the engineering problem, and provide appropriate and economical design method to be satisfactory with the requirement of production and develop cleaning room technology of our country.