| With the development of science and technology，In recent years,micro/nanotechnology occupy more and more important role in the field of in lifescience,microelectronics,optical,precision machinery and manufacturing,precisionmeasurement,medical,semiconductor,biological chemistry,and data storage.Micromechanical technology,micro/nano measurement technology,levels micro/nanotechnology and micro/nano positioning precision drive technology has become popularin the field of high and new technology in the world,with precision actuator of one formor another,precision measurement and precision positioning of the new actuator hasbeen developed in succession.Traditional precise actuator mainly adopts screw nutpair,rolling or sliding guide rail,turbine CAM mechanism,gear levermechanism,precision helical wedge mechanism,etc.Because there is a big gap andfriction, compact enough, crawling, many link transmission.Cannot satisfy therequirements of the modern precision actuator.With the continuous development of thepiezoelectric element performance ascension and the progress of the product processingtechnology, piezoelectric ceramic materials has an advantage such as with highprecision,fast response,large driving force,driving power,low working frequency widthand is not subject to electromagnetic interference,no empty back to wait for,in recentyears,actuator by such components as precision micro nanoscale precision actuator hasbeen more and more attention.Based on the major existing problems of modern precision actuator,this paperproposes a hybrid driven mechanism based ultra-precision solutions of piezoelectricactuators of many degrees of freedom,which involved in ultra-precision machinetool,the material specimen detection,mems,nano mechanical properties of precisionoptical,aerospace and robot,and other fields.The actuator scheme using the piezoelectricelement as the core actuating power source,flexible hinge as precision actuatingmechanism,which work together to achieve high-precision positioning loading mechanism.Analyzing the mechanism of piezoelectric stack and mechanical flexiblemechanism and cartesian space mechanics model of flexure hinge systematically,provides theory basis for the optimization design of actuator.Using the method whichcalmping the actuator rotor on the stator inside the bidirectional symmetric,guaranteesthe clamping process stability of the actuator.Through reverse the flexible hinge totransform the linear motion of the piezoelectric pile into the rotation of the rotormotion,and by using the linear motion of the piezoelectric pile clamping cooperate toachieve the rotor and rotor along the axial high precision linear motion.On the basis ofthe theory,developed a new type of piezoelectric actuators are many degrees offreedom.The drive based on step by step way to work,there is no clamping of the statorcomponents,can fully guarantee its compact structure,small and machiningprecision,and can realize the linear motion of the rotor axis and360°continuousrotation.Using the forward thrust,flexible hinge reverse back to the piezoelectric pileelastic combination,realize the drive rotor motion of both positive and reverse directionand the axial linear motion.This paper manufacture a actuator prototype and build the actuator testsystem,then the working principle of the test system is introduced in detail.And on thisbasis,testing the actuator in detail respectively such as the resolution of the rotarymotion and linear motion,the running speed,load capacity,movement stability andpositioning accuracy.Getting the main performance index of the rotary actuatorresolution is0.226μrad,the biggest rotation speed is3521.7μrad/s,carrying capacity is0.294N·m,Linear motion resolution is0.153μrad, linear motion maximum speed is105.31μm/s, linear motion bearing capacity is4.9N·m.These experiments prove that abionic high-precision Inchworm-type piezoelectric actuator system in this paper hashigh resolution and stability, and the advantages of strong carrying capacity andaccurate positioning. |
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