| Nowadays,with the development of science and technology,the micro-field has gradually gained widespread attention.In the field of aerospace,ultra-precision machine tools,micro-robots,MEMS and other cutting-edge technologies,micro-nano drive and positioning has become a top priority.However,the existing traditional driving devices can not keep up with the development of the frontier science field,facing the rapid development of cuttingedge science,piezoelectric precision driving technology and bionic driving technology came into being.Among them,the frictional inertia drive and the ruler type drive have been developed significantly due to their large stroke,compact mechanism and high precision,and are applied to cutting-edge science.Therefore,it is especially important to design a driver with high precision,large stroke and large driving force.The friction inertial drive and the ruler type drive can overcome the problems of small stroke and low resolution of the drive,and thus have been widely developed in recent years.However,there are problems such as small driving force and single degree of freedom.Therefore,after analyzing the advantages and disadvantages of many drivers at home and abroad,this paper combines the knowledge of stepping drive principle and flexible hinges,and proposes inertial friction and ruler drive double.The combination method utilizes the piezoelectric stack and the flexible hinge amplifying mechanism,and realizes the doubledegree-of-freedom movement mode of the straight line and the rotation by controlling the driving unit and the clamping unit.At the same time,under the existing experimental equipment,a multi-degree-of-freedom piezoelectric actuator was designed,and the structure was simulated and modal analyzed to ensure the feasibility and practicability of the driver.In addition,the experimental system with this driver as the core is built,which mainly includes the software and hardware parts,and completes the performance test and analysis of the designed piezoelectric actuator.The friction pair adjustment mechanism is proposed to ensure that the step distance caused by the machining error and the assembly error is too small.By testing the driver,The resolution of the rotating module is 5.432?rad,the effective driving voltage range is 10-150 V,the operating frequency of the driving frequency is 1-200 Hz,the maximum acceptable vertical load is 200 g,and the maximum step angle is 1429.1?rad.The resolution of the linear module was measured to be 0.81?m,the driving voltage was 20-150 V,the working frequency of the driving frequency was 1-200 Hz,the maximum acceptable vertical load was 500 g,and the maximum step distance was 20.08?m.The experimental results and simulation analysis show that the two-degree-offreedom piezoelectric actuator designed in this paper can meet its own strength and stiffness requirements,and maintain high-precision linear and rotational output on the micro-nano scale,which solves the low stroke of the existing driver.The driving force is small,the resolution is low,the degree of freedom is small,the structure is complicated,and the linear and rotary unit modules are detachable,which ensures the compact structure and can be used to face different experimental requirements.The experimental results show that the driver exceeds expectations and creates a basis for further optimization.The double-degree-of-freedom driver studied in this paper has played a role in fueling the existing piezoelectric driving device.While ensuring the stroke,resolution and speed,it has the advantages of low price and excellent cost performance.It has played a certain positive role,and while satisfying the cutting-edge scientific research,it has promoted the application field of the extended drive. |
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