Research On Gratings Preparation Of808nm Distributed Feedback Laser Diode

808nm distributed feedback laser diode (DFB LD) with built-in Bragg grating, as the pumping source of Nd:YAG solid laser, has stable emission wavelength, narrow spectra, and wide operating temperature range, which can improve the pump efficiency of more than50%. The built-in Bragg grating as the main part of DFB LD, plays important role in deciding the performance of LD.In this thesis,808nm DFB LD was theoretical analysed, the order number, periode, duty cycle and depth of built-in Bragg grating was optimally designed, and the Bragg grating of808nm DFB LD was prepared with holographic lithography and wet etching.The optimized Bragg grating with order number of2, period of242nm, the duty cycle of0.23, and depth of76nm, has uniform stripes and is close to the rectangle. The fabricated808nm DFB LD was characterized, and it can be confirmed that the built-in Bragg grating has efficiency in locking wavelength, stablizing single-mode laser, and narrowing spectral width and so on.