Semiconductor Factory Equipment Parameters Automatic Detection System Software Design And Implementation

Equipment is the basic and important production factor for manufacturing company,and the equipment key parameter control is the most important one, it decides theequipment stability, quality of product and cycle time of production. After researchrelated theory of equipment parameter detection method and actual applications in theindustry, and based on customer request and exist problem, start from semiconductorequipment parameter auto-detection, research and design one automatically detectionsystem of semiconductor equipment key parameters, timely, directional andautomatically check all equipment key parameters, provide solid system for customerstimely find and fix equipment parameter abnormal issue.Based on the process flow of manufacturing, related theory and actual requirementof equipment parameters detection system, study current problem of manufacturingindustry, design one project which is suit for current semiconductor equipment. Centreon the requirement of automatically detection, timed and Directional, complete thesystem step by step, make sure the production equipment parameter control has highaccuracy, high dexterity, and full automation etc. this paper complete below work todesign one automatic equipment parameter detection system:1. Based on semiconductor process flow, equipment and factory environment,complete the needs analysis focus on semiconductor equipment, make thecontinuously thinking of design more clear;2. During overall and detail design, design the optimized solution, analysis thebudget and complex of the system, select the proper data base and computerlanguage. Use VB design the data communication between equipment andserver, data transfer and compare, data feedback etc. Optimize the algorithmand structure, make sure the system running smoothly, and standardize the filetype and operation system of different type of equipment, use ACCESS as thesystem database, use typical comparison mode to do the one by one precisedetection;3. After completed the full function of system, integrate the system, and fully testthe system with function and performance test to make system more robust, andachieve the final target. Semiconductor factory equipment parameters automatic detection system wascompleted and actually running in the factory and test. It helps automatically detectequipment parameters of all modules, remove the manually check equipmentparameters by human because the system is accuracy and effective. Better control thecost and human resource, it demonstrates good performance of this system and canproliferate to other place.