| Excimer laser has been widely used in medical, industrial, scientific research and otherfields. The equipment of preionization has a great influence on its performance. In thisdissertation, a set of corona preionization device was designed and studied. Experiments oncorona preionization and the supported glow discharge were conducted, and theperformances were analyzed.Firstly, several common preionization structures were introduced, whose technicalcharacteristics and application range were analyzed and compared at the same time. Then aset of corona preionization device satisfying the special requirement of excimer laser wasdetermined.Secondly, the basic principal of corona preionization was described in detail and thefactors affecting corona discharge were analyzed. Then the scheme of experiment based onthe condition of our laboratory was put forward, and corona discharge in the air wasobserved, their intensity were detected by photodiode and PMT.Thirdly, the emission spectroscopy of corona and arc discharge in the air plasma weremeasured and compared. The rotational temperature of discharge plasma was calculated.Discharge in laser chamber was also observed and the developing process of dischargeplasma were recorded by ICCD camera.Finally, the results of experiment was analyzed and summarized. some suggestions onoptimized scheme were proposed. |
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