Dispatching Methodology For Batch Tool In Semiconductor Manufacturing Base On Intelligent Algorithm

With the development of semiconductor industry, semiconductorfoundry in China must face the challenges in many fields. Dispatchingbecame more and more important on account of reentrancy and unstableof manufacturing processes. How to improve the efficiency of wholeproduction line to optimize both inventory and output is the problemwhich the manufacturing department needs to solve.A real-time dispatching methodology is proposed in this paper. Dueto the capital problem of the Mini-Fab, the productivity becameunbalanced. The bottleneck tool of the production line was the wet batchtool. Using the Genetic Algorithm improves the original method with thecharacteristics of the tool and meets the process queue time target. Findan optimized method and execute it. So the daily move of the tool hadbeen improved45%and ensures the on time delivery from the factory tothe customer.