Reseach On Control Technology Of The Nanoteleoperation Systen Based On SEM

The nano-operating system is a precision equipment that can operate the nanomaterials such as movement, positioning, pickup, putdown and assembly at thenanoscale. In recent years, with obtaining wide attention and rapid development ofnano-technique, the nano-opertating technique is one of the key technologiesgradually. Because of its features like large sample cavity, hard real-time in imagesfeedback, SEM become one of the tools of micro-nano field gradually, and isapplied to nano-opertating more and more. In order to achieve nano-operation withhigh efficiency and high precision, after studied the teleoperation control method,this article designed a nano teleoperation system with tactile feedback and accurateposition tracking based on SEM using the sliding-mode-based impedance controlalgorithm.Aiming at the shortcomings of the existing nano teleoperation systems, a nanoteleoperation system with tactile feedback based on SEM be constructed, after theresearch status at home and abroad of nano-teleoperation system is analyzed indetail in this paper. SEM can not only provide real-time visual feedback, the vacuumchamber environment also can reduce the influence of external environment well forthe nanometer operation, tactile feedback operating equipment can provide the forcesensing telepresence during operation, thus the efficiency and flexibility ofoperation are guaranteed. Contact force of the slave is obtained by a probe withpiezoresistive sensor, and a signal conditioning circuit is designed for calibrating thesensor signal.In order to improve the telepresence nano of teleoperation system, aftersummarized model and control strategy of the teleoperation system, the idealresponses of the system are analyzed deeply using hybrid parameter matrix model oftwo-port network; And this article designed the teleoperation system controller,which the master with impedance control and the slave with the sliding-mode-basedimpedance control; The stability, transparency and traceability of proposed controlsystem are analyzed using Llewellyn’s absolute stability theorem and numericalanalysis method of operation performance, and the relations of stability,transparency and traceability with the system parameters are deduced; Throughemulated with the MATLAB/Simulink, the proposed control system are providedwith better capacity of proportional position and force tracking.Finally, in order to verify the performance of nano-teleoperation system, theexperimental studies are implemented. After designed using LabVIEWprogramming language, the software of control system is applied to nano-teleoperation experiment platform, and the experimental studies are dividedinto three parts, which are free tracking, base detecting and contact operation.Experimental results show that the proposed nano-teleoperation system are providedwith good tracking performance and nice telepresence, can achieve nano-opertationin real time, flexible and efficient, and laid a foundation for achieving complicatednano-operation and nano-assembly.