Study On The Key Technology And Research Of The Drive Device Of The Nano-manipulator System

Nanotechnology breakthroughs in the development of the industrialization of the excited people desire, only through the nano manufacturing technology can be materialized in nano science and technology and its application in the daily life of the people. Due to the nano scale manufacturing difficulties and limitations , it is necessary to research on the nano manufacturing infrastructure, therefore, nano robot has gradually become a new field. Nano manipulator based on SEM (scanning electron microscope) refers to the SEM as the main body and the object as nanometer scale precision operating system objects. SEM has a large chamber and real-time visual feedback characteristics of nano robot SEM has been widely studied in recent years, and become one of the most important tools for human to explore the microscopic world.Due to the scale characteristics of nano objects is small, their size and volume are also put forward higher requirements.Multiscale nano positioning technology with nanometer positioning accuracy, millimeter movement, small has become the key technology of nanometer scale operation must be solved,has the important theory significance and the practical value of micro driven generating cross scale precision motion method research and implementation.Therefore, in order to further explore the operation of nanometer micro drive technology and micro nano positioning technology to achieve precise nano manipulation, this paper for the nano manipulator and scanning electron microscopy (SEM) related to the integration of technology and nano manipulator driving device were detailed analysis, and the experimental study was carried out.This paper is divided into four parts.First, mainly over the background and the present situation of nanometer is operating system; Secondly,analysis of the kinematics of nano-manipulator mechanism, first by theoretical derivation of the movement of crank and connecting rod mechanism in general, the end of the arm end position, and then solving the inverse process, known as the space coordinates calculation mode of motion of each link.Then, complete the 3D solid modeling of the nano-manipulator by Solidworks.Design of stick slip driving structure, assembly structure of vacuum flange and the structure of the nano manipulator, The working space of the manipulator is studied as the object,analyzes the integration of scanning electron microscope and nano-impulator technology, structure design mainly includes the design of vacuum technology, vacuum pump system structure design and the vacuum flange. Then integrated the nano-impulator mechanism with scanning electron microscope.Finally,after completing the Scanning Electron Microscope structure design and integration work in the last chapter, we start from the stick slip driving mechanism research,establishes the theoretical model of slip stick, the stick slip driving simulation analysis by using Matlab, and then establish a stick slip driving positioning module. Last, set up the corresponding hardware experiment system processed positioning module of stick slip driving and test his driving position effect.