Design And Research Of Wafer Test Motion Stage

Multiple-freedom degrees precision motion stage is a crucial issue for the siliconmanufacturing and precision wafer test in the semiconductor industry. Multiple-freedomdegrees precision motion stage which is driven directly by linear motor and voice coil motorhas several advantages, such as high accuracy, fast response, long life, maintenance-free andsimple structure, compared to which is driven by traditional ball screw and rotary servo motor.Because of the obvious advantages, it plays a more and more important role in the field ofproduction and research of high-precision motion stage.First of all, the motion requirement and technical parameter of the stage were put forwardon the analysis of the wafer testing process. And in this paper, the planning of the stage’smotion process and the motion forms of each individual freedom are analyzed. Base on these,a overall design including mechanical structure design and control system design was putforward. Secondly, on the basis of the selection of drive mode and guide types, this paperdesigned the linear motion stage’s mechanical structure model, and made a prototype. Thenthe control principle of permanent magnet linear synchronous motor was described in thepaper and the relationship between thrust and current was given by that. Furthermore, asimulation model was established by Simulink and the prototype’s motion control wasrealized.Finally, the experiments were carried out by laser displacement sensor. The experimentresults proved that the precision of the prototype meets the design requirements, the prototypecould achieve the function of horizontal linear movement for the wafer test and theachievement could be the foundation for the further research.