Design Of Motion Control Board And Research On Synchronous Methods Of Wafer Stage And Reticle Stage

Lithography is one of the most important devices in IC(Integrated Circuit) production. It embeds the electronic components into semiconductor using a kind of optics corrosion technique. According to the development of Computer and Information technical, IC production needs lower power, more integration and more precision process. As we know, the measure becomes from Micron to Nano now. All of these give a big challenge to the development of Lithography. For breaking monopoly of the developed countries, China begins to vigorously strengthen the development of Lithography.The paper researches in precision wafer stage and reticle stage of lithography, including the design of motion control board and the theory of synchronous control. In this paper, Lithography control system is used in the international way of precision equipment commonly used:the IPC with dedicated motion control board. VME bus is used in Communication of the Control Board and IPC, which is fast and reliable in transmission. For the chip selection and circuit design of the Control Board, the paper considers the control precision and response speed, real-time requirement and cost, etc. Finally, uses the TI's DSP TMS320F2812 as control core and SCV64 as the VME bus interface, dual-port RAM as the data cache between them in order to avoid the traffic congestion. This paper designs a complete control circuit and produces a motion control board, which provides a hardware foundation for the control theory and software implementation.In addition, the accuracy and efficiency of the Lithography is largely affected by the Synchronous Control. The control system of this paper requires the position and speed of wafer stage and reticle stage achieving synchronization in the shortest time. This paper describes several common synchronous control strategy . Considering the actual situation of the topics,the writer selected a co-ordinated cross-couple synchronization control method, and designed the controller.At lastthe, the result of experimental simulation proved that the method is feasible and effective.