| When using interferometer for high-precision surface shape detection on optical components, we need multidimensional adjustment on etalon, the existing adjustments racks are mostly manual adjustment, the efficiency and the resolution are relatively low. To solve this problem, we designed a high-resolution, stability, good electric five-dimensional adjustment frame. The article has given a detailed analysis on the function of the adjusting frame, calculating and selecting other subsystems of the drive system, and fine-tune structure, initially set up the design of adjustment frame. Paper applies finite element analysis software ANSYS for simulating and analyzing the three-dimensional model which created by CATIA, making static analysis and optimization for some key stress structure. Also study on adjust frame modal and response spectrum, through software simulation finding the weak links and making structural optimization on it. The design of the prototype by assay, its displacement resolution can reach70nm, the angular resolution reaches0.1the interference fringes do not drift anymore after two hours, the results show that the adjustment frame meet the requirements. |
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