Structure Design Of Electric Adjusting Mount Of Horizontal Overloaded Two-Dimensional High Resolution Tilt

When using interferometer for high-precision surface shape detection on optical components,it need to adjust the position of the optic.Most of existing adjusting mounts are manual adjustment, the operation is quit inconvenient and the movement of the operator affects the results significantly,therefore the efficiency is relatively low. In order to solve this problem, a high-resolution adjustment mount is designed, which is stability and good electric dimensional.The paper shows a detailed analysis of the dimensional adjustment mount, via the selection of key components, determined the design of adjustment mount. This paper focuses on the design of angle adjusting mechanism,angle adjusting mechanism through the adoption of stepper motor drives,worm gear and worm reducer,rolling spiral subdivision adjustment implements the mount of high resolution requirements. Paper applies finite Hyper Mesh and ANSYS for statics analysis and modal analysis on angle adjustment mechanism. The adjustment mount by experimental testing,θX、θy angle can reach0.07" high resolution adjustment; the interference fringes are no longer drift after two hours, the experimental results shows that the rationality of the design analysis.