The Structure Design Of Nanometer Resolution Overloading Electronic Two-Dimension Adjusting Frame

With the rapid development of optical processing technology, the requirement of detecting the optical element is more and more high, when detect optical lens using the interferometer, for the optical adjusting rack is also put forward higher requirements.In order to avoid all kinds of vibration effects due to personnel on-site adjustment.For two-dimensional high standard large interferometer resolution adjustment, Not only can achieve the two dimensional inclination adjustment (θx、θy), but also with electric adjustment function, to achieve precise positioning of the second level control point.In order to ensure its stability, also has a locking torque adjusting frame, load in hundreds of kilograms of case, stable detection can not shift, ensure the high precision measurement of optical interferometer.In view of the Fizeau interferometer detecting large aperture optics ultra high precision deformation of how to realize the standard high resolution adjustment problem, design a large load, electric high resolution optical two-dimensional tilt adjusting rack, by analysis and calculation, the worm gear and two drive ball screw, and driven by stepping torque motor, realized nanometer can be self-locked resolution adjustment. Combined with practical work load stress analysis was done to prove its stability, meet the interferometer detection requirements.