Deformation Analysis Of Microbeam Under The Action Of Microdroplet

With the development of Micro-electro-mechanical systems(MEMS), it has abroad application prospects in many fields of information, biomedical, aerospace,nano-materials technology. Microbeam is a MEMS was a typical structure is widelyused in typical form. Because of its small geometry size and specialization ofpreparation process, mechanical properties of macroscopic size have great difference.On the basis of the previous research, this paper focus on the spherical droplet inmicro beam on the centerline of the upper surface, then make a study onmicro-deformation of beam size in the following aspects:Firstly, according to the beam of small deflection bent theory, this paper willclarify micro-liquid drops how to make deformation influence on micro-beam(including micro-cantilever, simply supported microbeam, clamped-simply supportedmicrobeam, and clamped–clamped microbeam), then get corresponding of resolvedsolutions numerical simulation. Then making a comparison of resolved solutions andnumerical simulation of value, and finding that theory value and numerical solutions ofresults can matched well. This provides good validation for theory analysis of work.Secondly, Liquid drops caused deformation on micro-beam, making every changesas the following aspects: micro-hanging arm beam in liquid drops of left end,beam notoccurred reverse; liquid drops by department regional produces smaller reverse; liquiddrops in right free end produces maximum displacement. The main support beam is bentrendering down in the surface, and in liquid drops by department regional of centerlocation produces maximum of displacement; One end fixed-one end bent down for asimply supported beam curve upwards, in the center of the droplet’s region have thegreatest displacement; Both ends fixed beam bent downward, upward bending ofmoderately, also in the droplets have a maximum displacement of the central location ofthe region. Results show that the major impact of micro-droplet on microbeam and liquid droplets, droplet size, places related to size of micro-cantilever.Finally, the research work is summarized, for scientific analysis of droplet onmicro-deformation of the beam provides a theoretical basis and reference significance.