Pull-in Characteristic Analysis Of The Effect Of Casimir Force On The Nano-electromechanical System

MEMS(Micro Electro Mechanical Systems) has become the main development direction ofMicroelectronics technology. Many countries have invested and have got a relatively research. Withthe decrease of the size of the device, NEMS(Nano-electromechanical system) emerges as the timesrequire.The size of NEMS is from sub-nanometer to hundreds of nanometers. The most importantfeature of NEMS actuator which driven by the static electricity is the Pull-in phenomenon. Pull-inphenomenon makes the two plates reach a critical position by static electricity. When the actuatordimensions down to the nanoscale, the effect of the Casimir force will become more prominent.Pull-in phenomenon is now used as a switching mechanism. So, researching the Pull-in parametersby the Casimir force is necessary whether in theoretical research or practical application.The theory and prospects for the development of MEMS and NEMS devices have beenintroduced in this paper. Pull-in phenomenon of Nano scale actuators by the Casimir effect has beenresearched, The Pull-in parameter has been calculated only by the electrostatic force; The Pull-inparameter has been calculated only by the Casimir force; The Pull-in parameter has been calculatedby both electrostatic force and Casimir force. And these three results have been compared andanalysis.The Nano scale actuator size range affected by the Casimir force. The dynamic Pull-inparameters by the Casimir force effect is focused on in this paper. of Pull-in, divides into notconsider damping and to consider damping to be discussed separately. Pull-in parameters have beencalculated the derivation and Matlab simulation curve graphics, intuitive and accurate determinationof the device which size would need to consider the impact of the Casimir effect.