Study Of 3-PPSR Parallel Micro-Manipulator

Micromanipulation is an important emergency technology developed mainly over the past decade. The micro/nano manipulation systems have been widely applied to MEMS manufacturing, optical parts alignment, optical fiber connection, laser navigation, biomedical engineering and IC manufacturing. Micromanipulator is the key component of micro/nano manipulation systems.Its main function is to change the pose of micro objects with high precision of sub-micrometer or nanometer scale. Obviously, its performance directly influences the capacity of the entire micromanipulation system.With the rapid development of micro/nano technology, the 6 degree of freedom (DOF) micromanipulator with high flexure and nanometer positioning accuracy is the most significant instrument in micro/nano manipulation and it deserves a deep research.A new type of 6 DOF 3-PPSR micromanipulator is developed, which adapts piezoelectric actuators and spring supporting parallel mechanism. It has the advantages of low resource consuming, high resolution, high frequency response, compact framework and high stiffness.The new type of limb developed provide a new method to the design of flexure hinge; the integrative base not only makes the structure more compact, but also avoids rigging error because of processing separately.According to the characteristics of the micromanipulator, the kinematics of the micromanipulator is analyed, and obtains the input/ouotput displacement equation, the micro displacements equations of the flexure hinges and the workspace of the micromanipulator. The stiffnesses of nano-positioning stage and flexure hinges are deduced according to the theory of structural mechanics. Taken the stiffnesses as the goal of optimization, the parameters of the flexure hinges are optimized with the methods of theoretical calculation and the finite element analysis (FEA) respectively. With the the control software developed, 3-PPSR micromanipulator is controlled to experiment. The results of the experiments show the rationality of the design of 3-PPSR micromanipulator, the correctness of the theory model and the validity of FEA. In the end, by error analysis, summarizing the error sources in the driving system, transmission...