Investigations Of Glucose Concentration Sensors Based On C-MEMS/NEMS Structures

Carbon microelectrode arrays can be fabricated based on traditionalCarbon-microelectronics Systems (C-MEMS) process, involving UV photolithographyprocess of SU8photoresist followed by high temperature carbonization. It has shownexcellent biological compatibility, conductivity, and large specific surface area, which willget potential applications as components in sensors, microbattery and super capacitor. Onthe other hand, due to the unique physical, chemical, and biologically compatibleproperties, the nano materials have received wide applications in various devices, such asbiosensors and biochip. The biological devices fabricated from the nano materialsdemonstrate excellent performances, including higher current density, higher sensitivity,and wider detection range. Thus our motivation for fabrication of the MEMS andNanoelectronics Systems (NEMS) integrated structures is to harness both the spectacularproperties of nanomaterials and carbon.In this study, we developed low-cost and facile approaches to integrate nanomaterialson C-MEMS structures. It involved mixing Carbon Nanotubes (CNTs) in SU8photoresists,carbon-assisted growth of Silicon Oxynitride (SiOxNy) nanowires and catalytic growth ofSilicon Oxide (SiO2) nanowires. We also proposed the growth mechanism for SiO2andSiOxNy nanowires on carbon post based on our experiment observations. The electricaland electrochemical measurements were conducted on the integrated structures, includingC-MEMS/MWNTs、 C-MEMS/SWNTs、 C-MEMS/SiO2、C-MEMS/SiOxNy. Furtherdiscussions about these integrated structures have been carried out.Besides, we have fabricated glucose sensors based on the C-MEMS,C-MEMS/SWNTs and C-MEMS/SiO2structures through co-deposition of glucose oxidase(GOD) and electrochemically polymerized polypyrrole (PPy). Sensing performance of thevarious glucose sensors was tested and compared with other studies, showing greatimprovement in the sensitivity. It’s expected these C-MEMS/NEMS based glucose sensorswill find promising applications in glucose concentration releated fields.