| A most famous verse is known that"A poor workman blames his own tools", but as much as concerned with micro/nano-fabrication, it is obvious that the fabrication techniques plus materials are in the range of limitation to those just around the corner. Due to this limited scope, no doubt that the semiconductor industry implemented the prominent methods for instance surface micromachining as well as subsequently the bulk-micromachining, for the earliest booming commercial microelectromechanical systems (MEMS) devices to be fashioned. Nowadays, the comprehensive micro/nano-fabrication approach in the dominant technological research armory has attracted a number of"tools", which comprise of UV lithography, substrates containing non-silicon configurations and, additional lately, carbon MEMS/NEMS (C-MEMS/NEMS).Actually, C-MEMS/NEMS technology belongs to the carbonization of the polymer ancestors having salient properties at micro-or-nano-structural level. In this technology, an inert or the plummeting is adopted for the polymer that is figured out and handled at high temperature for altering the whole microstructure system into the carbon structure. The shape of the polymer is defended throughout this exchange mechanism and also it shows the signs of isometric contraction in a managed way of all the materials and the practices. Mainly, all C-MEMS/NEMS envisaged applications posses the outstanding advantageous of electrochemical properties of paralytic-carbon.In this dissertation, initially, a brief introduction is given as a start up step for MEMS, NEMS, and C-MEMS/NEMS. Then etching phenomena on silicon surface through flux based modeling, C-MEMS microelectrodes fabrication methods and their linked with substrate, rules for designing, essential parameters, and some applications for C-MEMS microelectrode usage in a conductive solution are furnished. Subsequently, the study of multilayerd C-MEMS/NEMS fabrication is finished. The three dimensional multi-shaped, multi-angular carbon microelectrodes are designed and fabricated by using the newly micro-fabrication material like carbon. The microfabrication technique such as pyrolysis is selected and the novel 3D microelectrode multidesigns are analyzed for bioparticles sensing and manipulation with various aspects. Based on dielectrophoresis behavior, these fabricated carbon microelectrodes are investigated by novel three dimensional design methods. The applications of these designs are introduced with respect to biotechnological devices. Application of C-MEMS technology in dissimilar applications such as dielectrophoresis devices and C-MEMS devices especially for biomedical application are explained fully in this research work.In detail, a C-MEMS process is put forwarded and further the microfabrication methods are brought into detail. During the pyrolysis step, the alteration of the properties of the materials is next explicated. Some hurdles during the design and fabrication of 3D carbon microelectrodes for C-MEMS applications based on dielectrophoresis (DEP) force are also taken into account. A novel designed methodology for high-throughput 3D dielectrophoretic (DEP) separation and manipulation of bioparticles is introduced on the bases of a strong relationship of the both electric as well as velocity field gradient. These C-MEMS structure utilization by Ultra Violet (UV) lithography is discovered theoretically plus C-MEMS devices frequent usage in biosensing application is also examined. Lastly C-NEMS applications in biomedical field are lighted up.C-MEMS micro/nano fabrication is method of research in an extensive vision. Up-till now, thoroughly study and research work is in progress for accurate and precise micro/nano fabrication practice for micro/nano-devices, nano manipulation and modification based on carbon structures. A few other applications based on carbon micro/nano fabrication require an auxiliary learning and enhancement in future.
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