A Mems-based Silicon Nanowire Manufacturing Technology Research

In this dissertation, the fabrication, characteristics and applications of a Micro Electro Mechanical System (MEMS) technology based Single Crystal Silicon Nanowire (SiNWs) are intensively studied. Firstly, an effective silicon nano-fabrication method based on Silicon On Insulator (SOI) wafer is proposed. This is followed by the study and integration of each single step of the fabrication process. Based on the proposed process flow, a bunch of SiNWs are successfully fabricated. This is then used to design and analyze a Clamped-Clamped Beam (CC-Beam) structure Nano Electro Mechanical System (NEMS) resonator.The fabrication methods, SiNW and NEMS resonator introduced in this dissertation have the following advantages over the existing technology and devices:A. Avoid using the expensive and time-consuming top-down method, the proposed fabrication method lowers the cost on fabrication, improves the efficiency;B. Using SOI material, we fully utilize the mass production of the MEMS fabrication method. It is quality controllable and compatible with VLSI fabrication;C. The fabricated SiNWs are easily to be controlled in size, easily to be arranged in functional arrays. The current fabricated SiNWs has the dimension of length L ranging from 10^μm¹00^μm, diameter up to⁵0ⁿm;D. The SiNWs based NEMS resonator has a small size of L=10^μm, W=⁵0ⁿm,ultra-low power consumption of P_min in pw range, a relatively high resonating frequency of f₀ =141.2 MHz and a relatively high quality factor of Q=1669.74;The fabrication method proposed in this dissertation is promising to be used in the research and development of nano electronics devices, nano optics devices and nano sensonrs. The proposed NEMS resonator is promising to be used as ultra small size microwave communication devices.