Study On Micro/Nano-Operation Based On AFM

Atomic force microscope(AFM) has been promoting nanotechnology dramatically since it came into the world in 1986 which enable researchers to study the material surface structure and function on nanometer-scale. Although AFM was initially applied to measure the surface topography, physical and mechanical or other properties, it will be performed as a tool to explore to the nano-world.The study of micro/nanoelectrectronic devices is one of the important subjects. At present, Micro/Nano-operation is a prominent method to make Micro/Nano-structure. In this thesis, Micro/Nano-structures by field-induced oxidation and nano-manipulation separately were made by using the AFM.As one of the substitutable technology of the traditional optical lithography, the local oxidation by AFM has unique advantages in the field of nanofabrication. The AFM local oxidation is inherently a simple and low cost technique, which provides the capability of nanofabricatian and in situ observation, these merits make the technique a promising method to construct nanodevices and nanocircuit in the future. The purpose of this work is to improve the AFM focal oxidation technique and to get more cognition in both the experiments and the theories, so as to establish the basis date for the future applicable research. It is concluded that the height and the radius of nanostructures increase with the raising of the applied voltage and the pulse time. The simplified model of tip-sample system was established to simulate and calculate the distribution of the local electric field strength on the sample surface under different voltages, tip-sample distances and tip radius. Based on these calculations, the linear dependence between the applied voltages and the heights of oxide structures was reasonable. The results also indicated that the radius and heights of nanostructure decreased notably with the increase of tip-sample distances. Moreover, it could be deduced that the radius of oxide structures would keep linear relationship with the tip...