Preparation And Performance Of Magnetron Sputtering Crnx Film Studies

This paper adopts magnetron sputtering film coating equipment and technology, CrNx coating layer can be obtained on Q235steel surface. Hardness test, microstructure observation, XRD test, abrasion resistance and corrosion resistance test are taken for samples which prepared under different Process conditions.Experimental results show, As thickness of CrNx coating increases, coating layer gradually preferred geting selected to grow into{111} by {200}. With growth orientation of high hardness and better wearability CrNx coating layer of111, shall obtain preferred orientation with{the CrNx phase). Surface "cellular" organization morphology, and became apparent to the "bumps" trend increase. When CrNx coating layer surface morphology homogeneously dense "cellular" organization, hardness is taller, the exterior also is evener smooth, without falls off phenomenon. Source voltage and seepage Cr stage sample voltage, synthetic phase sample voltage, synthetic stage holding time on CrNx coating layer surface Cr, N atomic number of influence is not big, than work pressure, insulation temperature and Ar/N2flow compare the influence is bigger. Along with the work pressure increases, Cr, N atomic number than increase gradually; Heat preservation, the higher the temperature CrNx coating layer surface Cr, N atomic number than bigger; Ar/N2flow, than for three-to-two Cr, N atomic number than most close1:1, surface Cr, N atomic number approximates to1:1, better than the performance of CrNx coating layer. CrNx coating layer surface morphology is "cellular" organization, a particle density even, combined with high strength. In the same wear conditions, CrNx coating layer relative wear speed minimum, wearability are unprocessed of Q235steel sample improved. With sand CrNx coating layer increased, degree of relative wear speed increases; The larger the load CrNx coating layer, the more quality loss, wear relatively wear with greater speed. Coating layer failure form is mainly the wear fractured and spalling.Coating processing, compared with the original sample in acidic solution with lower activity dissolution rate and better passivation performance; Coating layer unchanged materials in neutral solution of the cathode reaction process, anode tower phil slope reduced, anode polarization rate increase, but just happens in the defect place. Protective character depends on:it reduced the corrosive medium in the electrode surface of the cluster, blocking the reactant and corrosion product transmission, increased the loop resistance, the surface defects is decided after the corrosion resistance of handling important factors. Research shows that coating layer failure mechanism is:erosive ion first through the defect transmission and and Cr passivation membrane penetration passivating film produced complexation reaction to the substrate, at the same time as corrosion deeply, coating layer and the base off the adhesion strength of the drop, gradually, the protective effects of loss of substrate. Coating layer, the corrosion mechanism of anode reaction process is:after all is lost, the first electronic cathode reaction in neutral passivation solution for universitier reaction, modified layer surface generated compounds effective hindered the corrosive medium to dissolve the matrix surface effect, inhibit the anode corrosion rate are intensifying.