Fmea Failure Mode And Effect Analysis In The Application Of Semiconductor Process After

FMEA (Fail Mode and Effect Analysis) is a kind of method used to identify potential failure modes and do effect analysis. By implementing FMEA, the weakness and the fault of the products can be found out before product design or manufacturing period and the prototype of a product can be determined whether potential fault before mass production has. FMEA have been successfully used in military aviation, general industrial products manufacturing and production process design and other fields.Semiconductor manufacturing has the extremely high concentration of not only automation management but also manual operation. The thesis is to reduce the quality issue and tool downtime ration by applying a quality management tool to system management, process management, equipment management and manual operation management in semiconductor. By the analysis of FMEA theory and real samples in A corporation, a series of effective and useful countermeasure can be found and taken. After the countermeasure is taken, every potentional quality risk can be effectively controlled to improve the product quality and improve product throughput.This thesis shows FMEA is an effective management tool in semiconductor back-end production. With the good understanding and application of FMEA theory, yield improvement, cost-down and efficiency improvement can be realized.