A Microscopic Coaxial Observation Of Excimer Laser Processing System

With the development of micro-technology, MEMS processing system has beengradually into our lives. MEMS system give us a wonderful perspective what is thenew understanding of the micro-world and its transformation. With excimer laseretching technology on the bio-chip micro-technology development, MEMSprocessing system has opened up a new era. Traditional micro fabrication using CNCmachine tools are bulky and heavy. They are difficult to obtain high processingefficiency and operational accuracy.This paper mainly discuss about the microscope coaxial positioning,micro-processing control table, excimer laser processing etching characteristicsmatched, control technology on the computer interface, hardware control platform,control software, and image processing.In the course of the study, I try to develop an excimer-processing MEMSprocessing system, to be different from the excimer micro-etching the shackles oftraditional processing systems.Firstly, research the MEMS technology at home and abroad. Secend,I discuss thecoaxial processing applications, and study the analysis of the main application of themicro-vision system architecture, Finally, I analyze the problems which have beendiscussed.Computer-based serial communication control in STC90c516RD+MCU hardwarecontrol platform to achieve the precise controlling of movement of the XY axis of themicro platform. I realized the microscope lens transformation and coating reflection.Furthermore, focus on the excimer laser test. More in-depth analysis and imageprocessing algorithms select from a variety of algorithms to the optimal algorithm forthis experiment.In the end, under the environment of WINDOWS and Visual C++as a softwaredevelopment platform, the entire excimer processing system model visualizationsoftware has been controlled; and design a set of excimer processing systemmicro-processing environment, then I got a coaxial observation processing andautomatic tracking system.