Research On Image Processing Technology For Laser Differential Confocal Microscope

The realization of measurement and analysis of test samples by using imageprocessing technique is to take the image as a means of detecting and transmittinginformation, thus extracting useful information from the image and achieving themeasurement and evaluation of geometrical quantities. It has the non-contact, high-speed,high-precision, automatic measurement and many other advantages, which is widely usedin a variety of non-contact real-time precision measurement.In order to meet the demand of the high-end imaging instrument in the fields of nanomanufacturing, semiconductor testing, materials engineering and biomedicine, ourlaboratory developed a laser differential confocal microscope system. Image processingtechnology is studied for the scanning images in this subject, so as to realize thehigh-precision sample surface topography measurement and provide an efficient way formicro-nano samples test.The subject is supported by National Instrumentation Program “Laser differentialconfocal measurement instrument development and application research”(No.2011YQ040136), National Natural Science Foundation for Major Research Plan onNano Manufacturing “Research on radially technology for nano-structures(No．91123014). The following are the main research works I have completed so far:1. Image preprocessing technology of microscope system. Analyzing the imagingprinciple of laser differential confocal scanning microscope, applying image inpainting,image smoothing, image tilt correction to the scanning images which have defects, noisesor tilt, thus restoring the image data and obtaining a good visual effect.2. Image measurement technology of microscope system. Analyzing the microscopemeasurement functions based on the requirements of industrial measurement, studying thedata extraction methods of line measurement and surface measurement, then realizing thecontour and volume parameters measurement by the accumulation of adjacent pixels basedon calculus. 3. Based on VS2010software platform, combined with OpenCV, OpenGL, GDI+, etc.accomplishing the write and test of image preprocessing and image measurement algorithm,so as to realize the automate processing and measurement of the sample scanning image.