The Development Of Transparent Conducting Anti-reflection Thin Film

Stealth technology plays important role in camouflage and assault of airplane. And it is gradually pay attention to army in the world. Especially in high-tech modern war, it is so important that it can decide winning or not of the war. ITO thin film can enhance the optical window’s electro-magnetism wave shielding efficiency of automatic tracking system of cruise missile and airborne eo system etc., and it can enhance the ability of preventing from the radar detecting and realize the stealth for the radar. This characteristic of ITO thin film is significant to stealth technology that rapidly developing with counter-reconnaissance technology.This paper reports the ITO thin film structure fabrication, electric principle, eo characteristic and electro-magnetism wave shielding characteristic etc. It introduces in detail the ITO thin film’s application in weapon system, design process of multilayer film, process of coating and operational principle of experiment equipment and test instrument. And it also analyze in detail the factor that affect the characteristic of thin film, such as thin film material composition, oxygen content, background vacuum, substrate temperature, evaporation rate, vacuum conditions, atmosphere annealing process etc. At last, we obtained the optimal parameter for the process.Based on the specification requirement of optical window for preventing from radar detecting, we designed and coated multilayer anti-reflection film, including ITO thin film. It has some good characteristics, such as high transmittance, low resistance, high mechanical strength, steady chemical characteristic and anti-erosion etc. ITO thin film have not only the capability of defrost when it is heated, but also have the capability of electro-magnetism wave shielding. Technical specification of ITO thin film is the average visible transmittance of98.38%and its block resistance lower than25ohm. We carry out the salt-frog test and strength test for the test sample, and we give the measurement curve, test data and the analysis result of the test.