| This article according to the practical application need, elaborated the ITO transparent conducting film basic principle, introduced the membrane department's design process, corresponding plates the system craft, the experiment operating system application and the principle and so on. And aims at Chinese Astronautics department to use in on the flight vehicle protection of frost heating up, the electromagnetic screen glass window demand, designs and prepares one kind of transparent conducting film to have the high visible light transmissibility, the high infrared index of reflection, the low electronic resistivity, the machinery and chemistry performance is stable, not only may play to the electromagnetic screen, the heat insulation role, but also may defrost after the thin film circular telegram heats up.Prepares the ITO transparent conducting film technical specification is: The visible light realizes high passes T>98% , the block resistance is less than or equal to 50 ohms.This experiment uses the equipment is the Integrity-36 completely automatic vacuum film plating machine, carries on the deposition coating using the electron beam and the ion assistance servosystem, uses the UV3100PC spectrophotometer test spectrum characteristic, and survey the block resistance with the HL5500PC four probes measuring instrument, has produced the experimental curve and the empirical datum, as well as quality synthetic evaluation result.
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