Preparation And Performance Study Of ZnO Based Transparent Conductive Thin Film On Flexible Substrate

Transparent conductive oxide(TCO) films have received great attention due to their applications as the electrodes of the solar cells or other optoelectronic devices. The heavily n-type doped ZnO films have several advantages over indium tin oxide films(ITO) or SnO2 films.As we know,the band gap of ZnO can be increased by Mg doping.ZnMgO alloy is also a useful material in photoelectricity field.In contrast with the glass substrates,the TCO films prepared on flexible substrates have many advantages,which are robust,light,and low cost.Preparing ZnO thin films on flexible substrate would open a new field in ZnO device applies.Transparent conducting ZnO:Ga and Zn_1-xMg_xO:Ga films were deposited on flexible Polyethylene terephthalate(PET) substrates by pulsed laser deposition(PLD). The effect of Mg content,the thickness of buff layer,deposition temperature,oxygen pressure and deposition time to the thin film performance was studied.The main results were obtained as follows:1.We prepared c-axis oriented ZnO:Ga films on flexible substrate(PET) by Pulsed laser deposition(PLD).The film are transparent and conductive.We systematically analyzed the influence of Mg content and buff layer on the films quality.The results show that the band-gap of the film increase and the electric performance decrease with the Mg content increase;the buff layer can obviously improve the structural and electric performance of the film.2.The effect of deposition temperature,oxygen pressure and deposition time on the films quality was investigated.And the optimal growth conditions were obtained.We found that the deposition temperature have little influence on thin film's performance and the best performance of the film can only got under proper oxygen pressure and deposition time.The ZnO buff layer with 50nm thickness can improve the structural and electric performance of the film obviously.But the transmittance of the film descends a little.