Study On Integration Of Miniaturized Microwave Microplasma Power Source

The microwave microplasma has many important applications in the industrial field. To design a microwave microplasma power source is the foundation of the study of microplasma.Compared to the previous single frequency and single power microwave micro plasma source, the power source designed in this paper is characteristic of adjustable frequency and adjustable power. And the whole system is highly integrated and some portable. The research provides a more convenient tool on microplasma excitation.In order to achieve the above functions, the designed power source is designed for several parts:a frequency synthesizer, an adjustable attenuator and a power amplifier. In this paper, the PLL frequency synthesizer is designed firstly, in which the frequency of output signal could be adjusted from2.3GHz to2.6GHz, the performance on phase noise is good, and the output power could be adjusted from-4dBm to+5dBm. Secondly, the RF broadband adjustable attenuator is designed which has the attenuation of-2dB to-17dB between2.3GHz to2.6GHz. Finally, the high-gain broadband power amplifier is design at2.45GHz which has the gain of bout40dB, the broadband gain flat is less than1dB from2.3GHz to2.6GHz, and the peak power is more than42dBm. Based on real Frequency Technique in broadband power amplifier design, the broadband performances of two power amplifiers are simulated with software and compared.The microwave micro-Plasma power source has the adjustable output frequencies from2.3GHz to2.6GHz and the adjustable output power from+20dBm to+40dBm.