The Study On Miniaturized Microwave Micro-plasma Power Supply

Low-power microwave micro-plasma technology is one of the high-techs which is combined with micro-electronics (nano-electronics) technology, microwave and plasma technology. It has developed with MEMS technology. The microwave plasma using MEMS technology has a big change in its structure and characteristics.Compared with the other forms of micro plasma, the microwave micro-plasma has many outstanding advantages such as simple structure, long life, stable state and no electrode pollution. The research on the microwave micro-plasma source shows that the power generator is miniaturized to a portable source with active integration and it is suitable for the developing trends of MEMS technology.In a low-power microwave micro-plasma source, a low microwave power of only a few hundred milliwatts or even tens of millewatts is required to be used to excite micro-plasma. Therefore, the power generator can be integrated with the antenna unit. In the thesis, Bluetooth and VCO (voltage controlled oscillator) which are widely used now are selected to synthesize a signal generator. Because of the small output signal of Bluetooth and VCO, such as the signal of 0～100mW which is not high sufficiently to excite the micro-plasma, it is necessary to amplify its output signal. Through the reasonable designing of this Power Amplifier, the low-power microwave plasma can be excited by pre-processing the output power signal.