Tdi Visible Light Sensor Technology Research

The paper introduces status and development in TDI CCD(Time Delay and Integration Charge Coupled Device), as well as the fundamental,working,structure,variety,application of TDI CCD. It focus on the design and manufacture technology ofTDI CCD. At last the result and the analysis of performance by test is given. 2048×96 TDI CCD is line array as well as multi-output.The image quality is decided by output uniformity. The deviation of dark current to multi-output leads to bad output uniformity. It may be no signal in one or several output.The completeness of output structure is destroyed.The uniformity to manufacture technology leads to decrease resolution,sensitivity and dynamic range. It focus on device design and optimized manufacture technology.At last the output uniformity of 2048×96 TDI CCD is improved.TDI CCD is used in universe.It must be radiation hardening. The damage mechanisms of CCD irradiated by different particles and the degradation of radiation parameters , such as dark current, flatband voltage and CTE, are presented. The radiation hardening technologies are introduced from the aspects of manufacture technology, device structures and operation modes.Through optimized design and strict manufacture technology for 2048×96 TDI CCD, devices meet the request of anticipate by parameter test.