Environmental Factors And Control Method

The IC(Integrated Circuit) industry is a strategic industry, the12ndFive-Year National Plan of IC indicated the importance of IC industry, andthe manufacturing of IC is an extremely important part of the IC industry.ICManufacturing is a very complex process and lithography is the mostimportant part. Because of the sensitivity of precision of lithographyequipments and chemical materials used in the process, environmentalfactors will have great impact to product quality, especially micro-vibration,particle pollution and AMC(Airborne Molecular Contamination),they arethe objects of study in environmental engineering.This paper attempts to departure from the principle of lithographyequipment, combined with domestic and foreign information and practicalworking experience, discusses the impact of these environmental factors,and analyzes the source of various environmental factors as well as relevantstandards. Then describe the environmental equipments and their use in theprocess. After that, using AHP (Analytic Hierarchy Process) and trendanalysis method analyze several actual cases.Because of the complexity of the environmental factors in lithographyarea, every process should be comprehensive and integrated. In this study, amore complete analysis of the IC FAB lithography area environmentalfactors control methods has been made, setup effective developmentprocess of micro-vibration, particle pollution and AMC treatment and andsummarizes the relevant experience.