Develop The High Acceleration Precision Motion Platform

Electronic chip is developing towards smaller size, more tube feet and larger quantity with high speed. The wire bonding machine is the packing equipment in the chip processing assembly line. In order to meet the needs of the development of the chip, the next generation of packaging equipment should be greatly improved the production efficiency, product quality and reduced the production cost. High acceleration and high precision motion platform is one of the key components of chip packing equipment. The high speed starting and stopping and high precision positioning is the premise and guarantee of completing chip packages with high efficiency.Aiming at the requirements of high acceleration and high accuracy of XY platform, combining with the Major National Science and Technology Special" High Acceleration and High Precision Motion System and the Control Technology" (project Number: 2009-003 ZX02021), the dynamic characteristic of the XY motion platform in the wire bonding machine is deeply studied in this thesis, the ultra-high acceleration and precision motion platform is designed, a finite element analysis and optimization has done to the platform. Finally, the dynamic performance of the platform is verified by experiments.In the aspect of extablishing mechanics model of the platform, detailed force analysis is carried, and the following optimization directions are reached. The dynamics model of the platform is built, the stiffness of the cross roller surface that has great influence on the performance of platform is finished through detailed study, the deformation of the ball is calculated using the contact mechanics, and the finite element analysis with simple and accurate spring element is carried, the weak link is designed again.In terms of the platform drives, using direct driving mode with the permanent magnetic linear synchronous motor (LPMSM), the linear motor structure is built. This has realized the concise drive method. The electromagnetic field finite element analysis of the motor structure is carried; the output of the motor is got. At last, the conclusion that the performance of the linear motor constrains the increase of the performance of XY motion platform is put forward.Finally, the experiment system to verify the dynamic study of the high acceleration and precision motion platform is established and the modal experiments are done. The experimental results demonstrate that the high acceleration precision motion platform designed based on the dynamic study has a higher natural frequency and basicly meets inherent frequency index requirements. The experimental results and finite element analysis results are slightly different, which can prove the reliability of the finite element analysis.